JPH0566537B2 - - Google Patents

Info

Publication number
JPH0566537B2
JPH0566537B2 JP59168467A JP16846784A JPH0566537B2 JP H0566537 B2 JPH0566537 B2 JP H0566537B2 JP 59168467 A JP59168467 A JP 59168467A JP 16846784 A JP16846784 A JP 16846784A JP H0566537 B2 JPH0566537 B2 JP H0566537B2
Authority
JP
Japan
Prior art keywords
strain
diaphragm
sensitive resistor
layer
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59168467A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6147532A (ja
Inventor
Masahiro Kume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP16846784A priority Critical patent/JPS6147532A/ja
Publication of JPS6147532A publication Critical patent/JPS6147532A/ja
Publication of JPH0566537B2 publication Critical patent/JPH0566537B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP16846784A 1984-08-11 1984-08-11 歪センサ Granted JPS6147532A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16846784A JPS6147532A (ja) 1984-08-11 1984-08-11 歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16846784A JPS6147532A (ja) 1984-08-11 1984-08-11 歪センサ

Publications (2)

Publication Number Publication Date
JPS6147532A JPS6147532A (ja) 1986-03-08
JPH0566537B2 true JPH0566537B2 (en]) 1993-09-22

Family

ID=15868649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16846784A Granted JPS6147532A (ja) 1984-08-11 1984-08-11 歪センサ

Country Status (1)

Country Link
JP (1) JPS6147532A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0380661A4 (en) * 1987-10-07 1991-08-14 Kabushiki Kaisha Komatsu Seisakusho Semiconducteur thin-film pressure sensor and method of producing the same
JP2651492B2 (ja) * 1989-11-08 1997-09-10 セイコー電子工業 株式会社 相対圧圧力センサの製造方法
JP5295388B2 (ja) * 2009-12-25 2013-09-18 アルプス電気株式会社 フォースセンサ及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123179A (ja) * 1974-08-20 1976-02-24 Matsushita Electric Ind Co Ltd Atsuryokuhenkanki
US4188258A (en) * 1978-05-18 1980-02-12 Gulton Industries, Inc. Process for fabricating strain gage transducer
JPS56107141A (en) * 1980-01-30 1981-08-25 Matsushita Electric Ind Co Ltd Pressure sensor

Also Published As

Publication number Publication date
JPS6147532A (ja) 1986-03-08

Similar Documents

Publication Publication Date Title
US3800264A (en) High temperature transducers and housing including fabrication methods
US5896081A (en) Resistance temperature detector (RTD) formed with a surface-mount-device (SMD) structure
JPH0749277A (ja) 圧力センサ及び圧力センサの製法
US4658650A (en) Vibration and acoustic wave detecting device employing a piezoelectric element
JPS61176832A (ja) トランスジユーサ・インサート、その製造方法、および機械的変動測定センサ
US5057811A (en) Electrothermal sensor
US5837886A (en) Gas sensor
US4367408A (en) Pyroelectric type infrared radiation detecting device
US4309687A (en) Resistance strain gauge
JPH0566537B2 (en])
JP2011089859A (ja) 温度センサ
JP3819081B2 (ja) 温度センサ
JPH0287030A (ja) 白金温度センサ
JPH11194060A (ja) 圧力検出装置
JP2996161B2 (ja) 白金感温抵抗体
JPS6286871A (ja) 半導体圧力センサ
JP3375533B2 (ja) 半導体圧力変換器
JPS63298128A (ja) 圧力センサ
JPS5936835B2 (ja) 半導体圧力・差圧伝送器
JPS61284653A (ja) ガスセンサ
JPS6175535A (ja) 半導体装置
KR830000113B1 (ko) 반도체 압력 변환기
JPS5940252B2 (ja) 半導体圧力センサ−
JPS581551B2 (ja) 半導体圧力変換器
JPH10221144A (ja) マイクロヒータ及びその製造方法